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Accueil du site > Divers > Soutien à la recherche > Techniques Lithographie >

14 novembre 2018

Microscope à balayage FEG


The microscope is situated in the clean room of the CRISMAT, dedicated to e-beam lithography activities.

TESCAN Mira 3

Scanning Electron Microscope
with integrated e-beam lithography facilities

Field effect gun
maximum voltage 20 keV
electrostatic beam blanker
continuous control of beam intensity

in-beam detector
secondary electron detector
backscattered electron detector