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Accueil du site > Divers > Soutien à la recherche > Microscopes électroniques à balayage > S.E.M. and EDS/WDS/EBSD analysis

S.E.M. and EDS/WDS/EBSD analysis

2 juillet 2010

Description :
FEG Scanning Electron Microscope Carl ZEISS SUPRA 55.
The detection system is made by a secondary electron detector « in-lens » or SE1, an Everhart Thornley secondary electron detector or SE2 with a « collector bias » settable from -250 to + 400 V located in the chamber and an AsB (Angle Selective Beam) or BSE (Energy Selective Backscattered) located at the lens ending. The chamber gets as well an Infra Red camera that help with the stage motions.

Few characteristics :
Chamber size : Ô=330 mm et h = 270 mm.
Acceleration voltage : 0.1-30 kV.
Magnification : 12-200000x with SE mode and 100-200000x with AsB mode.
Working distance : 1-50 mm.

EDAX analysis system :
EDS (Energy Dispersive X-Ray Spectroscopy).
WDS (Wavelenght Dispersive X-Ray Spectroscopy).
EBSD (Electron Backscatter Diffraction).

Possibilities :
The FEG electron production and the capability to work at very low focus distance (1 mm) allows to work at low voltage and so examine non connductives samples.

The EDS system resolution (120 eV) allows to make quick quality and quantity analysis.

The WDS system resolution (20 eV) allows to make quantity analysis. It is a very usefull system when the peaks are overlapped with EDS.

The EBSD system shows the crystals orientations.